Download 3D TCAD Simulation for Semiconductor Processes, Devices and by Simon Li PDF

By Simon Li

ISBN-10: 1461404800

ISBN-13: 9781461404804

Technology computer-aided layout, or TCAD, is necessary to today’s semiconductor know-how and anyone operating during this must recognize whatever approximately TCAD. This booklet is ready the best way to use software program to fabricate and try nearly semiconductor units in 3D. It brings to lifestyles the subject of semiconductor gadget physics, with a hands-on, instructional method that de-emphasizes summary physics and equations and emphasizes actual perform and wide illustrations. assurance incorporates a accomplished library of units, representing the cutting-edge know-how, reminiscent of SuperJunction LDMOS, GaN LED units, etc.

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3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics

Expertise computer-aided layout, or TCAD, is important to today’s semiconductor expertise and anyone operating during this must comprehend whatever approximately TCAD. This publication is set the right way to use software program to fabricate and try out almost semiconductor units in 3D. It brings to existence the subject of semiconductor equipment physics, with a hands-on, educational strategy that de-emphasizes summary physics and equations and emphasizes genuine perform and broad illustrations.

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Additional resources for 3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics

Example text

While full 3D process simulation takes substantially longer time than quasi 3D, it is often necessary when the third dimension (z direction) effect is considered. 3 About Technology Computer Aided Design (TCAD) 17 Fig. 17 3D segregation example Still another method called hybrid 3D, which takes into account the 3D oxidation only. For LOCOS process growth, the oxide will grow into the z direction to form the famous “bird’s beak”. If the doping condition underneath the oxide layer stays the same in the z direction, we can neglect the dopant diffusion in the third dimension and consider only the oxide diffusion.

One can show that with proper choices of parameters, a good approximation to the non-parabolic band structure can be obtained using anisotropic parabolic bands. This approximation greatly simplifies the calculation of gain, spontaneous emission and carrier concentration, and it allows one to incorporate strain effects into the TCAD program. The following discussion mostly applies to compound materials while strained silicon can be treated in the same manner using effective masses with anisotropy.

Then, it will be relatively easy to compute the stress of each layer in the MQW system given the material elastic constants. 3 Oxidation 27 The above same-lattice-spacing approaching works well for calculating stress arising from interfaces between the massive substrate and the top deposits. However, for interfaces between material deposits (such as SiGe pockets) and surrounding materials in the horizontal direction, the assumption of same-lattice-spacing is no longer valid since the size of the materials involved are comparable and there is real competition between the materials for stretching the lattice spacing.

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